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The assessment of metal surface cleanliness by XPS
The most commonly used quantity to characterize surface cleanliness through X-ray photoemission spectroscopy (XPS) measurements is the so-called relative atomic surface concentration of carbon (at.% C). We have investigated the relationship between at.% C values and the C 1s peak area on Cu and we f...
| Autores principales: | , |
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| Lenguaje: | eng |
| Publicado: |
2006
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| Acceso en línea: | https://dx.doi.org/10.1016/j.apsusc.2005.07.007 http://cds.cern.ch/record/964988 |