Lattice location and thermal stability of implanted Fe in ZnO

The emission channeling technique was applied to evaluate the lattice location of implanted $^{59}$Fe in single-crystalline ZnO. The angular distribution of $\beta^{-}$- particles emitted by $^{59}$Fe was monitored with a position-sensitive electron detector, following 60-keV low dose ($2.0 \times 10^{13}$ cm$^{-2}$) room-temperature implantation of the precursor isotope $^{59}$Mn. The emission patterns around the [0001], [1102], [1101] and [2113] directions revealed that following annealing at 800°C 95(8)% of the Fe atoms occupy ideal substitutional Zn sites with root mean square displacements of 0.06-0.09 Å.