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Contamination and ESD Control in High Technology Manufacturing
Autores principales: | , , |
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Lenguaje: | eng |
Publicado: |
Wiley
2006
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Materias: | |
Acceso en línea: | http://cds.cern.ch/record/995190 |
_version_ | 1780911473745199104 |
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author | Welker, Roger W Nagarajan, R Newberg, Carl E |
author_facet | Welker, Roger W Nagarajan, R Newberg, Carl E |
author_sort | Welker, Roger W |
collection | CERN |
id | cern-995190 |
institution | Organización Europea para la Investigación Nuclear |
language | eng |
publishDate | 2006 |
publisher | Wiley |
record_format | invenio |
spelling | cern-9951902021-04-22T02:06:44Zhttp://cds.cern.ch/record/995190engWelker, Roger WNagarajan, RNewberg, Carl EContamination and ESD Control in High Technology ManufacturingEngineeringWileyoai:cds.cern.ch:9951902006 |
spellingShingle | Engineering Welker, Roger W Nagarajan, R Newberg, Carl E Contamination and ESD Control in High Technology Manufacturing |
title | Contamination and ESD Control in High Technology Manufacturing |
title_full | Contamination and ESD Control in High Technology Manufacturing |
title_fullStr | Contamination and ESD Control in High Technology Manufacturing |
title_full_unstemmed | Contamination and ESD Control in High Technology Manufacturing |
title_short | Contamination and ESD Control in High Technology Manufacturing |
title_sort | contamination and esd control in high technology manufacturing |
topic | Engineering |
url | http://cds.cern.ch/record/995190 |
work_keys_str_mv | AT welkerrogerw contaminationandesdcontrolinhightechnologymanufacturing AT nagarajanr contaminationandesdcontrolinhightechnologymanufacturing AT newbergcarle contaminationandesdcontrolinhightechnologymanufacturing |