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Building blocks X-FAB SOI 0.18 $\mu$m

This work has been done in order to study a new technology provided by X-FAB named xt018. It is an SOI (Silicon On Insulator) technology with a minimal gate length of 180 nm. Building blocks have been done to test the advantages and drawbacks of this technology compared to the one currently used (AM...

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Detalles Bibliográficos
Autores principales: Cizel, Jean-Baptiste, Ahmad, S, Callier, S, Cornat, R, Dulucq, F, Fleury, J, Martin-Chassard, G, Raux, L, Taille, C de La, Thienpont, D
Lenguaje:eng
Publicado: 2015
Materias:
Acceso en línea:https://dx.doi.org/10.1088/1748-0221/10/02/C02007
http://cds.cern.ch/record/2637385