Material quality & SRF performance of Nb films grown on Cu via ECR plasma energetic condensation

The RF performance of bulk Nb cavities has continuously improved over the years and is approaching the intrinsic limit of the material. Although some margin seems still available with processes such as N surface doping, long term solutions for SRF surfaces efficiency enhancement need to be pursued. Over the years, Nb/Cu technology, despite its shortcomings, has positioned itself as an alternative route for the future of superconducting structures used in accelerators. Significant progress has been made in recent years in the development of energetic deposition techniques such as Electron Cyclotron Resonance (ECR) plasma deposition. Nb films with very high material quality have then been produced by varying the deposition energy alluding to the promise of performing SRF films. This paper presents RF measurements, correlated with surface and material properties, for Nb films showing how, by varying the film growth conditions, the Nb film quality and surface resistance can be altered and how the Q-slope can be eventually overcome.