Development of new 3D pixel sensors for phase 2 upgrades at LHC

We report on the development of new 3D pixel sensors for the Phase 2 Upgrades at the High-Luminosity LHC (HL-LHC). To cope with the requirements of increased pixel granularity (e.g., 50x50 or 25x100 um2 pixel size) and extreme radiation hardness (up to a fluence of 2e16 neq cm-2), thinner 3D sensors...

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Detalles Bibliográficos
Autores principales: Dalla Betta, Gian-Franco, Boscardin, Maurizio, Mendicino, Roberto, Ronchin, Sabina, Sultan, D.M.S., Zorzi, Nicola
Lenguaje:eng
Publicado: 2016
Materias:
physics.ins-det
Detectors and Experimental Techniques
Acceso en línea:https://dx.doi.org/10.1109/NSSMIC.2015.7581946
http://cds.cern.ch/record/2239702
_version_ 1780953039030452224
author Dalla Betta, Gian-Franco
Boscardin, Maurizio
Mendicino, Roberto
Ronchin, Sabina
Sultan, D.M.S.
Zorzi, Nicola
author_facet Dalla Betta, Gian-Franco
Boscardin, Maurizio
Mendicino, Roberto
Ronchin, Sabina
Sultan, D.M.S.
Zorzi, Nicola
author_sort Dalla Betta, Gian-Franco
collection CERN
description We report on the development of new 3D pixel sensors for the Phase 2 Upgrades at the High-Luminosity LHC (HL-LHC). To cope with the requirements of increased pixel granularity (e.g., 50x50 or 25x100 um2 pixel size) and extreme radiation hardness (up to a fluence of 2e16 neq cm-2), thinner 3D sensors (~100 um) with electrodes having narrower size (~ 5 um) and reduced spacing (~ 30 um) are considered. The paper covers TCAD simulations, as well as technological and design aspects relevant to the first batch of these 3D sensors, that is currently being fabricated at FBK on 6-inch wafers.
id oai-inspirehep.net-1501528
institution Organización Europea para la Investigación Nuclear
language eng
publishDate 2016
record_format invenio
spelling oai-inspirehep.net-15015282021-05-03T20:13:49Zdoi:10.1109/NSSMIC.2015.7581946http://cds.cern.ch/record/2239702engDalla Betta, Gian-FrancoBoscardin, MaurizioMendicino, RobertoRonchin, SabinaSultan, D.M.S.Zorzi, NicolaDevelopment of new 3D pixel sensors for phase 2 upgrades at LHCphysics.ins-detDetectors and Experimental TechniquesWe report on the development of new 3D pixel sensors for the Phase 2 Upgrades at the High-Luminosity LHC (HL-LHC). To cope with the requirements of increased pixel granularity (e.g., 50x50 or 25x100 um2 pixel size) and extreme radiation hardness (up to a fluence of 2e16 neq cm-2), thinner 3D sensors (~100 um) with electrodes having narrower size (~ 5 um) and reduced spacing (~ 30 um) are considered. The paper covers TCAD simulations, as well as technological and design aspects relevant to the first batch of these 3D sensors, that is currently being fabricated at FBK on 6-inch wafers.We report on the development of new 3D pixel sensors for the Phase 2 Upgrades at the High-Luminosity LHC (HL-LHC). To cope with the requirements of increased pixel granularity (e.g., 50&#x00D7;50 or 25&#x00D7;100 &#x03BC;m<sup>2</sup> pixel size) and extreme radiation hardness (up to a fluence of 2&#x00D7;10<sup>16</sup> n<sub>eq</sub> cm<sup>-2</sup>), thinner 3D sensors (~100 &#x03BC;m) with electrodes having narrower size (~ 5 &#x03BC;m) and reduced spacing (~ 30 &#x03BC;m) are considered. The paper covers TCAD simulations, as well as technological and design aspects relevant to the first batch of these 3D sensors, that is currently being fabricated at FBK on 6" wafers.arXiv:1612.00608oai:inspirehep.net:15015282016-12-02
spellingShingle physics.ins-det
Detectors and Experimental Techniques
Dalla Betta, Gian-Franco
Boscardin, Maurizio
Mendicino, Roberto
Ronchin, Sabina
Sultan, D.M.S.
Zorzi, Nicola
Development of new 3D pixel sensors for phase 2 upgrades at LHC
title Development of new 3D pixel sensors for phase 2 upgrades at LHC
title_full Development of new 3D pixel sensors for phase 2 upgrades at LHC
title_fullStr Development of new 3D pixel sensors for phase 2 upgrades at LHC
title_full_unstemmed Development of new 3D pixel sensors for phase 2 upgrades at LHC
title_short Development of new 3D pixel sensors for phase 2 upgrades at LHC
title_sort development of new 3d pixel sensors for phase 2 upgrades at lhc
topic physics.ins-det
Detectors and Experimental Techniques
url https://dx.doi.org/10.1109/NSSMIC.2015.7581946
http://cds.cern.ch/record/2239702
work_keys_str_mv AT dallabettagianfranco developmentofnew3dpixelsensorsforphase2upgradesatlhc
AT boscardinmaurizio developmentofnew3dpixelsensorsforphase2upgradesatlhc
AT mendicinoroberto developmentofnew3dpixelsensorsforphase2upgradesatlhc
AT ronchinsabina developmentofnew3dpixelsensorsforphase2upgradesatlhc
AT sultandms developmentofnew3dpixelsensorsforphase2upgradesatlhc
AT zorzinicola developmentofnew3dpixelsensorsforphase2upgradesatlhc

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