Development of interconnected silicon micro-evaporators for the on-detector electronics cooling of the future ITS detector in the ALICE experiment at LHC

The thermal management of the on-detector electronics and the development of low mass integrated cooling systems have become a crucial task in the design of silicon tracking detectors for high energy physics applications. The use of microfabricated ultra-thin silicon cold plates has gained considerable interest in this sense. One of the most challenging open issues with micro-channel devices is the interconnection of several units into a single system, allowing for the thermal management of silicon detectors covering large surfaces. In this paper, we present a novel concept of low mass interconnected silicon microchannel devices for the future Inner Tracking System of the ALICE experiment at CERN. This design involves for the first time flow circulation and fluid evaporation in two hydraulically interconnected devices. The solution proposed satisfies the requirements of the detector while minimizing the mass involved.