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Analysis of electron energy distribution function in the Linac4 H− source

To understand the Electron Energy Distribution Function (EEDF) in the Radio Frequency Inductively Coupled Plasmas (RF-ICPs) in hydrogen negative ion sources, the detailed analysis of the EEDFs using numerical simulation and the theoretical approach based on Boltzmann equation has been performed. It...

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Detalles Bibliográficos
Autores principales:	Mochizuki, S, Mattei, S, Nishida, K, Hatayama, A, Lettry, J
Lenguaje:	eng
Publicado:	2016
Materias:	Accelerators and Storage Rings
Acceso en línea:	https://dx.doi.org/10.1063/1.4932322 http://cds.cern.ch/record/2265748

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