Solid-state Marx generator for the compact linear collider breakdown studies

A high repetition rate, semiconductor based, Marx generator has been designed and developed for a spark gap system: this system will allow the study of breakdown rate phenomena for different materials and surface finishes, for RF structures for the proposed Compact Linear Collider (CLIC). The Marx circuit is based on new SiC MOSFETs (Metal Oxide Semiconductor Field Effect Transistors), with 15 compact stages, capable of running with capacitive type loads during normal operation and also short-circuit mode at reduced repletion rate. Experimental tests with 150 pF to 650 pF dummy capacitances and also the actual spark gap system are presented: these tests and measurements prove the performance of the Marx generator to generate pulses from 200 ns to 100 μs pulse width, up to 10kV, with frequencies up to 1 kHz and pulse voltage rise times less than 100 ns with a load capacitance of not more than 150 pF. In addition, first breakdown results validating the operation of the Marx generator during breakdown are presented.