Development of large area resistive electrodes for ATLAS NSW Micromegas

Micromegas with resistive anodes will be used for the NSW upgrades of the ATLAS experiment at LHC. Resistive electrodes are used in MPGD devices to prevent sparks in high-rate operation. Large-area resistive electrodes for Micromegas have been developed using two different technologies: screen printing and carbon sputtering. The maximum resistive foil size is 45 × 220 cm with a printed pattern of 425-$\mu$m pitch strips. These technologies are also suitable for mass production. Prototypes of a production model series have been successfully produced. In this paper, we report the development, the production status, and the test results of resistive Micromegas.