Anneal induced transformations of defects in hadron irradiated Si wafers and Schottky diodes

In this research, the anneal induced transformations of radiation defects have been studied in n-type and p-type CZ and FZ Si samples, irradiated with relativistic protons (24 GeV/c) and pions (300 MeV/c) using particle fluences up to $3 \times 10^{16}$ cm$^{−2}$. The temperature dependent carrier trapping lifetime (TDTL) spectroscopy method was combined with measurements of current deep level transient spectroscopy (DLTS) to trace the evolution of the prevailing radiation defects. The contactless TDTL technique has been shown to be preferential when the radiation induced trap density approaches or exceeds the dopant concentration and when it is necessary to avoid modification of a detector structure due to annealing processes at elevated temperatures. The deep level spectra were complementarily examined by using DLTS spectroscopy on Schottky diodes made of irradiated Si wafer fragments. The dominant radiation defects and their transform paths under isothermal and isochronal anneals have been revealed. A good agreement between the DLTS and TDTL spectra has been obtained.