Numerical analysis of ion dynamics in RF ICP discharge

We have worked on the development of a particle-based numerical model of a hydrogen Radio Frequency (RF) Inductively Coupled Plasma (ICP). In the previous work, it has been shown that the model is able to simulate the E-to-H discharge mode transition, which is one of the distinct features of RF ICP....

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Detalles Bibliográficos
Autores principales: Nishida, K, Mattei, S, Kobayashi, W, Lettry, J, Hatayama, A
Lenguaje:eng
Publicado: 2018
Materias:
Accelerators and Storage Rings
Acceso en línea:https://dx.doi.org/10.1063/1.5053312
http://cds.cern.ch/record/2676000
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author Nishida, K
Mattei, S
Kobayashi, W
Lettry, J
Hatayama, A
author_facet Nishida, K
Mattei, S
Kobayashi, W
Lettry, J
Hatayama, A
author_sort Nishida, K
collection CERN
description We have worked on the development of a particle-based numerical model of a hydrogen Radio Frequency (RF) Inductively Coupled Plasma (ICP). In the previous work, it has been shown that the model is able to simulate the E-to-H discharge mode transition, which is one of the distinct features of RF ICP. The purpose of the present study is to investigate the E-to-H discharge mode transition of the hydrogen RF ICP by our numerical model. In particular, the spatiotemporal behavior of ions, which we have not investigated in the previous work, will be presented in this paper.
id oai-inspirehep.net-1695462
institution Organización Europea para la Investigación Nuclear
language eng
publishDate 2018
record_format invenio
spelling oai-inspirehep.net-16954622019-09-30T06:29:59Zdoi:10.1063/1.5053312http://cds.cern.ch/record/2676000engNishida, KMattei, SKobayashi, WLettry, JHatayama, ANumerical analysis of ion dynamics in RF ICP dischargeAccelerators and Storage RingsWe have worked on the development of a particle-based numerical model of a hydrogen Radio Frequency (RF) Inductively Coupled Plasma (ICP). In the previous work, it has been shown that the model is able to simulate the E-to-H discharge mode transition, which is one of the distinct features of RF ICP. The purpose of the present study is to investigate the E-to-H discharge mode transition of the hydrogen RF ICP by our numerical model. In particular, the spatiotemporal behavior of ions, which we have not investigated in the previous work, will be presented in this paper.oai:inspirehep.net:16954622018
spellingShingle Accelerators and Storage Rings
Nishida, K
Mattei, S
Kobayashi, W
Lettry, J
Hatayama, A
Numerical analysis of ion dynamics in RF ICP discharge
title Numerical analysis of ion dynamics in RF ICP discharge
title_full Numerical analysis of ion dynamics in RF ICP discharge
title_fullStr Numerical analysis of ion dynamics in RF ICP discharge
title_full_unstemmed Numerical analysis of ion dynamics in RF ICP discharge
title_short Numerical analysis of ion dynamics in RF ICP discharge
title_sort numerical analysis of ion dynamics in rf icp discharge
topic Accelerators and Storage Rings
url https://dx.doi.org/10.1063/1.5053312
http://cds.cern.ch/record/2676000
work_keys_str_mv AT nishidak numericalanalysisofiondynamicsinrficpdischarge
AT matteis numericalanalysisofiondynamicsinrficpdischarge
AT kobayashiw numericalanalysisofiondynamicsinrficpdischarge
AT lettryj numericalanalysisofiondynamicsinrficpdischarge
AT hatayamaa numericalanalysisofiondynamicsinrficpdischarge

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