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Numerical analysis of effects of ion-neutral collision processes on RF ICP discharge
The discharge process of a radiofrequency (RF) inductively coupled plasma (ICP) has been modeled by an ElectroMagnetic Particle-in-Cell Monte Carlo Collision method (EM PIC-MCC). Although the simulation had been performed by our previous model to investigate the discharge mode transition of the RF I...
| Autores principales: | , , , |
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| Lenguaje: | english |
| Publicado: |
2018
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| Materias: | |
| Acceso en línea: | https://dx.doi.org/10.1063/1.5002169 http://cds.cern.ch/record/2694250 |