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Testing of the sensing element of a capacitive micromechanical accelerometer
Sensing element is one of the main parts of a micromechanical accelerometer. It determines a lot of parameters of the whole device. Its design flow is a complex process including the steps from the analysis of technical and technological requirements to testing the manufactured devices. Testing is o...
| Autores principales: | , , , , |
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| Lenguaje: | eng |
| Publicado: |
2020
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| Acceso en línea: | https://dx.doi.org/10.1088/1742-6596/1536/1/012007 http://cds.cern.ch/record/2719097 |