Radiation Tolerance of Capacitive Humidity Sensor for High-Energy Physics Applications

This letter proposes a sensor candidate for measurements of relative humidity in environments under highradiation doses, such as high-energy physics detector’ chambers. The sensor performance has been tested at CERN facility under high radiation doses by emulating the situations that will be present in an operating silicon-based detector. At irradiation facility, several humidity sensors were exposed to direct proton beam. The results of the tests show good radiation tolerance and ability of these sensors to operate in radiation exposed conditions.