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A Study of Al(2)O(3)/MgO Composite Films Deposited by FCVA for Thin-Film Encapsulation

Al(2)O(3) and MgO composite (Al(2)O(3)/MgO) films were rapidly deposited at low temperatures using filtered cathode vacuum arc (FCVA) technology, aiming to achieve good barrier properties for flexible organic light emitting diodes (OLED) thin-film encapsulation (TFE). As the thickness of the MgO lay...

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Detalles Bibliográficos
Autores principales:	Yuan, Heng, Zhang, Yifan, Li, Qian, Yan, Weiqing, Zhang, Xu, Ouyang, Xiao, Ouyang, Xiaoping, Chen, Lin, Liao, Bin
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2023
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10003942/ https://www.ncbi.nlm.nih.gov/pubmed/36903070 http://dx.doi.org/10.3390/ma16051955

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