Review of Recent Advances in Gas-Assisted Focused Ion Beam Time-of-Flight Secondary Ion Mass Spectrometry (FIB-TOF-SIMS)

Time-of-flight secondary ion mass spectrometry (TOF-SIMS) is a powerful chemical characterization technique allowing for the distribution of all material components (including light and heavy elements and molecules) to be analyzed in 3D with nanoscale resolution. Furthermore, the sample’s surface ca...

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Detalles Bibliográficos
Autores principales: Priebe, Agnieszka, Michler, Johann
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Review
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10003971/
https://www.ncbi.nlm.nih.gov/pubmed/36903205
http://dx.doi.org/10.3390/ma16052090

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10003971/
https://www.ncbi.nlm.nih.gov/pubmed/36903205
http://dx.doi.org/10.3390/ma16052090

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