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The Effect of Post Deposition Treatment on Properties of ALD Al-Doped ZnO Films

In this paper, aluminum-doped zinc oxide (ZnO:Al or AZO) thin films are grown using atomic layer deposition (ALD) and the influence of postdeposition UV–ozone and thermal annealing treatments on the films’ properties are investigated. X-ray diffraction (XRD) revealed a polycrystalline wurtzite struc...

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Detalles Bibliográficos
Autores principales:	Petrova, Dimitrina, Napoleonov, Blagovest, Minh, Chau Nguyen Hong, Marinova, Vera, Lan, Yu-Pin, Avramova, Ivalina, Petrov, Stefan, Blagoev, Blagoy, Videva, Vladimira, Strijkova, Velichka, Kostadinov, Ivan, Lin, Shiuan-Huei, Dimitrov, Dimitre
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2023
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10005121/ https://www.ncbi.nlm.nih.gov/pubmed/36903677 http://dx.doi.org/10.3390/nano13050800

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