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Fast and Efficient Simulation of the FEBID Process with Thermal Effects
Focused electron-beam-induced deposition (FEBID) is a highly versatile direct-write approach with particular strengths in the 3D nanofabrication of functional materials. Despite its apparent similarity to other 3D printing approaches, non-local effects related to precursor depletion, electron scatte...
| Autores principales: | , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
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MDPI
2023
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10005571/ https://www.ncbi.nlm.nih.gov/pubmed/36903735 http://dx.doi.org/10.3390/nano13050858 |