Cargando…
Fast and Efficient Simulation of the FEBID Process with Thermal Effects
Focused electron-beam-induced deposition (FEBID) is a highly versatile direct-write approach with particular strengths in the 3D nanofabrication of functional materials. Despite its apparent similarity to other 3D printing approaches, non-local effects related to precursor depletion, electron scatte...
Autores principales: | Kuprava, Alexander, Huth, Michael |
---|---|
Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2023
|
Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10005571/ https://www.ncbi.nlm.nih.gov/pubmed/36903735 http://dx.doi.org/10.3390/nano13050858 |
Ejemplares similares
-
Irradiation-driven molecular dynamics simulation of the FEBID process for Pt(PF(3))(4)
por: Prosvetov, Alexey, et al.
Publicado: (2021) -
Charge Transport inside TiO(2) Memristors Prepared via FEBID
por: Baranowski, Markus, et al.
Publicado: (2022) -
Controlled Morphological Bending of 3D-FEBID Structures via Electron Beam Curing
por: Weitzer, Anna, et al.
Publicado: (2022) -
Nanoscale chemical and structural study of Co-based FEBID structures by STEM-EELS and HRTEM
por: Córdoba, Rosa, et al.
Publicado: (2011) -
Interactions of low-energy electrons with the FEBID precursor chromium hexacarbonyl (Cr(CO)(6))
por: Khreis, Jusuf M, et al.
Publicado: (2017)