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A Method for Detecting the Vacuum Degree of Vacuum Glass Based on Digital Holography

The vacuum degree is the key parameter reflecting the quality and performance of vacuum glass. This investigation proposed a novel method, based on digital holography, to detect the vacuum degree of vacuum glass. The detection system was composed of an optical pressure sensor, a Mach–Zehnder interfe...

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Detalles Bibliográficos
Autores principales: Li, Ting, Song, Qinghe, He, Guangjun, Xia, Haiting, Li, Haoxiang, Gui, Jinbin, Dang, Haining
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10007332/
https://www.ncbi.nlm.nih.gov/pubmed/36904672
http://dx.doi.org/10.3390/s23052468
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author Li, Ting
Song, Qinghe
He, Guangjun
Xia, Haiting
Li, Haoxiang
Gui, Jinbin
Dang, Haining
author_facet Li, Ting
Song, Qinghe
He, Guangjun
Xia, Haiting
Li, Haoxiang
Gui, Jinbin
Dang, Haining
author_sort Li, Ting
collection PubMed
description The vacuum degree is the key parameter reflecting the quality and performance of vacuum glass. This investigation proposed a novel method, based on digital holography, to detect the vacuum degree of vacuum glass. The detection system was composed of an optical pressure sensor, a Mach–Zehnder interferometer and software. The results showed that the deformation of monocrystalline silicon film in an optical pressure sensor could respond to the attenuation of the vacuum degree of vacuum glass. Using 239 groups of experimental data, pressure differences were shown to have a good linear relationship with the optical pressure sensor’s deformations; pressure differences were linearly fitted to obtain the numerical relationship between pressure difference and deformation and to calculate the vacuum degree of the vacuum glass. Measuring the vacuum degree of vacuum glass under three different conditions proved that the digital holographic detection system could measure the vacuum degree of vacuum glass quickly and accurately. The optical pressure sensor’s deformation measuring range was less than 4.5 μm, the measuring range of the corresponding pressure difference was less than 2600 pa, and the measuring accuracy’s order of magnitude was 10 pa. This method has potential market applications.
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spelling pubmed-100073322023-03-12 A Method for Detecting the Vacuum Degree of Vacuum Glass Based on Digital Holography Li, Ting Song, Qinghe He, Guangjun Xia, Haiting Li, Haoxiang Gui, Jinbin Dang, Haining Sensors (Basel) Article The vacuum degree is the key parameter reflecting the quality and performance of vacuum glass. This investigation proposed a novel method, based on digital holography, to detect the vacuum degree of vacuum glass. The detection system was composed of an optical pressure sensor, a Mach–Zehnder interferometer and software. The results showed that the deformation of monocrystalline silicon film in an optical pressure sensor could respond to the attenuation of the vacuum degree of vacuum glass. Using 239 groups of experimental data, pressure differences were shown to have a good linear relationship with the optical pressure sensor’s deformations; pressure differences were linearly fitted to obtain the numerical relationship between pressure difference and deformation and to calculate the vacuum degree of the vacuum glass. Measuring the vacuum degree of vacuum glass under three different conditions proved that the digital holographic detection system could measure the vacuum degree of vacuum glass quickly and accurately. The optical pressure sensor’s deformation measuring range was less than 4.5 μm, the measuring range of the corresponding pressure difference was less than 2600 pa, and the measuring accuracy’s order of magnitude was 10 pa. This method has potential market applications. MDPI 2023-02-23 /pmc/articles/PMC10007332/ /pubmed/36904672 http://dx.doi.org/10.3390/s23052468 Text en © 2023 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Li, Ting
Song, Qinghe
He, Guangjun
Xia, Haiting
Li, Haoxiang
Gui, Jinbin
Dang, Haining
A Method for Detecting the Vacuum Degree of Vacuum Glass Based on Digital Holography
title A Method for Detecting the Vacuum Degree of Vacuum Glass Based on Digital Holography
title_full A Method for Detecting the Vacuum Degree of Vacuum Glass Based on Digital Holography
title_fullStr A Method for Detecting the Vacuum Degree of Vacuum Glass Based on Digital Holography
title_full_unstemmed A Method for Detecting the Vacuum Degree of Vacuum Glass Based on Digital Holography
title_short A Method for Detecting the Vacuum Degree of Vacuum Glass Based on Digital Holography
title_sort method for detecting the vacuum degree of vacuum glass based on digital holography
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10007332/
https://www.ncbi.nlm.nih.gov/pubmed/36904672
http://dx.doi.org/10.3390/s23052468
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