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Lightweight Gas Sensor Based on MEMS Pre-Concentration and Infrared Absorption Spectroscopy Inside a Hollow Fiber
This paper reports on a compact and lightweight sensor for analysis of gases/vapors by means of a MEMS-based pre-concentrator coupled to a miniaturized infrared absorption spectroscopy (IRAS) module. The pre-concentrator was utilized to sample and trap vapors in a MEMS cartridge filled with sorbent...
Autores principales: | , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2023
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10007354/ https://www.ncbi.nlm.nih.gov/pubmed/36905013 http://dx.doi.org/10.3390/s23052809 |