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An Interface ASIC Design of MEMS Gyroscope with Analog Closed Loop Driving

This paper introduces a digital interface application-specific integrated circuit (ASIC) for a micro-electromechanical systems (MEMS) vibratory gyroscope. The driving circuit of the interface ASIC uses an automatic gain circuit (AGC) module instead of a phase-locked loop to realize a self-excited vi...

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Autores principales: Zhang, Huan, Chen, Weiping, Yin, Liang, Fu, Qiang
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10007420/
https://www.ncbi.nlm.nih.gov/pubmed/36904819
http://dx.doi.org/10.3390/s23052615
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author Zhang, Huan
Chen, Weiping
Yin, Liang
Fu, Qiang
author_facet Zhang, Huan
Chen, Weiping
Yin, Liang
Fu, Qiang
author_sort Zhang, Huan
collection PubMed
description This paper introduces a digital interface application-specific integrated circuit (ASIC) for a micro-electromechanical systems (MEMS) vibratory gyroscope. The driving circuit of the interface ASIC uses an automatic gain circuit (AGC) module instead of a phase-locked loop to realize a self-excited vibration, which gives the gyroscope system good robustness. In order to realize the co-simulation of the mechanically sensitive structure and interface circuit of the gyroscope, the equivalent electrical model analysis and modeling of the mechanically sensitive structure of the gyro are carried out by Verilog-A. According to the design scheme of the MEMS gyroscope interface circuit, a system-level simulation model including mechanically sensitive structure and measurement and control circuit is established by SIMULINK. A digital-to-analog converter (ADC) is designed for the digital processing and temperature compensation of the angular velocity in the MEMS gyroscope digital circuit system. Using the positive and negative diode temperature characteristics, the function of the on-chip temperature sensor is realized, and the temperature compensation and zero bias correction are carried out simultaneously. The MEMS interface ASIC is designed using a standard 0.18 μM CMOS BCD process. The experimental results show that the signal-to-noise ratio (SNR) of sigma-delta (ΣΔ) ADC is 111.56 dB. The nonlinearity of the MEMS gyroscope system is 0.03% over the full-scale range.
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spelling pubmed-100074202023-03-12 An Interface ASIC Design of MEMS Gyroscope with Analog Closed Loop Driving Zhang, Huan Chen, Weiping Yin, Liang Fu, Qiang Sensors (Basel) Article This paper introduces a digital interface application-specific integrated circuit (ASIC) for a micro-electromechanical systems (MEMS) vibratory gyroscope. The driving circuit of the interface ASIC uses an automatic gain circuit (AGC) module instead of a phase-locked loop to realize a self-excited vibration, which gives the gyroscope system good robustness. In order to realize the co-simulation of the mechanically sensitive structure and interface circuit of the gyroscope, the equivalent electrical model analysis and modeling of the mechanically sensitive structure of the gyro are carried out by Verilog-A. According to the design scheme of the MEMS gyroscope interface circuit, a system-level simulation model including mechanically sensitive structure and measurement and control circuit is established by SIMULINK. A digital-to-analog converter (ADC) is designed for the digital processing and temperature compensation of the angular velocity in the MEMS gyroscope digital circuit system. Using the positive and negative diode temperature characteristics, the function of the on-chip temperature sensor is realized, and the temperature compensation and zero bias correction are carried out simultaneously. The MEMS interface ASIC is designed using a standard 0.18 μM CMOS BCD process. The experimental results show that the signal-to-noise ratio (SNR) of sigma-delta (ΣΔ) ADC is 111.56 dB. The nonlinearity of the MEMS gyroscope system is 0.03% over the full-scale range. MDPI 2023-02-27 /pmc/articles/PMC10007420/ /pubmed/36904819 http://dx.doi.org/10.3390/s23052615 Text en © 2023 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Zhang, Huan
Chen, Weiping
Yin, Liang
Fu, Qiang
An Interface ASIC Design of MEMS Gyroscope with Analog Closed Loop Driving
title An Interface ASIC Design of MEMS Gyroscope with Analog Closed Loop Driving
title_full An Interface ASIC Design of MEMS Gyroscope with Analog Closed Loop Driving
title_fullStr An Interface ASIC Design of MEMS Gyroscope with Analog Closed Loop Driving
title_full_unstemmed An Interface ASIC Design of MEMS Gyroscope with Analog Closed Loop Driving
title_short An Interface ASIC Design of MEMS Gyroscope with Analog Closed Loop Driving
title_sort interface asic design of mems gyroscope with analog closed loop driving
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10007420/
https://www.ncbi.nlm.nih.gov/pubmed/36904819
http://dx.doi.org/10.3390/s23052615
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