Multimodal MEMS vibration energy harvester with cascaded flexible and silicon beams for ultralow frequency response

Scavenged energy from ambient vibrations has become a promising energy supply for autonomous microsystems. However, restricted by device size, most MEMS vibration energy harvesters have much higher resonant frequencies than environmental vibrations, which reduces scavenged power and limits practical...

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Detalles Bibliográficos
Autores principales: Feng, Haizhao, Bu, Ling, Li, Zhangshanhao, Xu, Sixing, Hu, Bingmeng, Xu, Minghao, Jiang, Siyao, Wang, Xiaohong
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10033895/
https://www.ncbi.nlm.nih.gov/pubmed/36969966
http://dx.doi.org/10.1038/s41378-023-00500-8

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10033895/
https://www.ncbi.nlm.nih.gov/pubmed/36969966
http://dx.doi.org/10.1038/s41378-023-00500-8

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