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Multimodal MEMS vibration energy harvester with cascaded flexible and silicon beams for ultralow frequency response
Scavenged energy from ambient vibrations has become a promising energy supply for autonomous microsystems. However, restricted by device size, most MEMS vibration energy harvesters have much higher resonant frequencies than environmental vibrations, which reduces scavenged power and limits practical...
| Autores principales: | , , , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Nature Publishing Group UK
2023
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10033895/ https://www.ncbi.nlm.nih.gov/pubmed/36969966 http://dx.doi.org/10.1038/s41378-023-00500-8 |