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Development of the multi-directional ablation process using the femtosecond laser to create a pattern on the lateral side of a 3D microstructure
Two-photon stereolithography (TPS) is widely used for the fabrication of various three–dimensional (3D) structures with sub-micron fabrication resolution in a single fabrication process. However, TPS is unsuitable for microstructures with fine-hole patterns. The laser ablation process can be easily...
Autores principales: | , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Nature Publishing Group UK
2023
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Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10036552/ https://www.ncbi.nlm.nih.gov/pubmed/36959274 http://dx.doi.org/10.1038/s41598-023-32030-8 |