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Studies of Electrical Parameters and Thermal Stability of HiPIMS Hafnium Oxynitride (HfO(x)N(y)) Thin Films
This work demonstrated the optimization of HiPIMS reactive magnetron sputtering of hafnium oxynitride (HfO(x)N(y)) thin films. During the optimization procedure, employing Taguchi orthogonal tables, the parameters of examined dielectric films were explored, utilizing optical methods (spectroscopic e...
Autores principales: | , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2023
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10051222/ https://www.ncbi.nlm.nih.gov/pubmed/36984417 http://dx.doi.org/10.3390/ma16062539 |