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ScAlN Film-Based Piezoelectric Micromechanical Ultrasonic Transducers with Dual-Ring Structure for Distance Sensing

Piezoelectric micromechanical ultrasonic transducers (pMUTs) are new types of distance sensors with great potential for applications in automotive, unmanned aerial vehicle, robotics, and smart homes. However, previously reported pMUTs are limited by a short sensing distance due to lower output sound...

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Detalles Bibliográficos
Autores principales:	Zhang, Yuchao, Miao, Bin, Wang, Guanghua, Zhou, Hongyu, Zhang, Shiqin, Hu, Yimin, Wu, Junfeng, Yu, Xuechao, Li, Jiadong
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2023
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10051667/ https://www.ncbi.nlm.nih.gov/pubmed/36984923 http://dx.doi.org/10.3390/mi14030516

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