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Study of the Performance Enhancement of Sc-Doped AlN Super High Frequency Cross-Sectional Lamé Mode Resonators

The increasing use of mobile broadband requires new acoustic filtering technologies that can operate efficiently at frequencies above 6 GHz. Previous research has shown that AlN Super High Frequency (SHF) Cross-Sectional Lamé Mode resonators (CLMRs) can address this challenge, but their performance...

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Detalles Bibliográficos
Autores principales:	Assylbekova, Meruyert, Pirro, Michele, Zhao, Xuanyi, Michetti, Giuseppe, Simeoni, Pietro, Rinaldi, Matteo
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2023
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10052684/ https://www.ncbi.nlm.nih.gov/pubmed/36984922 http://dx.doi.org/10.3390/mi14030515

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