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Plasma-Assisted Atomic Layer Deposition of IrO(2) for Neuroelectronics

In vitro and in vivo stimulation and recording of neuron action potential is currently achieved with microelectrode arrays, either in planar or 3D geometries, adopting different materials and strategies. IrO(2) is a conductive oxide known for its excellent biocompatibility, good adhesion on differen...

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Detalles Bibliográficos
Autores principales:	Di Palma, Valerio, Pianalto, Andrea, Perego, Michele, Tallarida, Graziella, Codegoni, Davide, Fanciulli, Marco
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2023
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10052997/ https://www.ncbi.nlm.nih.gov/pubmed/36985871 http://dx.doi.org/10.3390/nano13060976

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