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Preparation, Characterization, and Application of AlN/ScAlN Composite Thin Films

Piezoelectric aluminum nitride (AlN) thin film, as a commonly used material for high-frequency acoustic resonators, has been a research hotspot in the RF field. Doping Sc elements in AlN is one of most effective methods to improve the piezoelectricity of the material. In this work, the first princip...

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Detalles Bibliográficos
Autores principales:	Nian, Laixia, Qu, Yuanhang, Gu, Xiyu, Luo, Tiancheng, Xie, Ying, Wei, Min, Cai, Yao, Liu, Yan, Sun, Chengliang
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2023
Materias:	Communication
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10053234/ https://www.ncbi.nlm.nih.gov/pubmed/36984964 http://dx.doi.org/10.3390/mi14030557

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