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Homogeneity and Thermal Stability of Sputtered Al(0.7)Sc(0.3)N Thin Films

This work presents a study on the homogeneity and thermal stability of Al(0.7)Sc(0.3)N films sputtered from Al-Sc segmented targets. The films are sputtered on Si substrates to assess their structural properties and on SiO(2)/Mo-based stacked acoustic mirrors to derive their piezoelectric activity f...

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Detalles Bibliográficos
Autores principales:	Carmona-Cejas, José Manuel, Mirea, Teona, Nieto, Jesús, Olivares, Jimena, Felmetsger, Valery, Clement, Marta
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2023
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10055955/ https://www.ncbi.nlm.nih.gov/pubmed/36984049 http://dx.doi.org/10.3390/ma16062169

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