Improving Etched Flatness by Micro Airflow Array Pressurization in ITO Glass Laser Machining

In laser etching of ITO glass, the warpage due to workpiece positioning causes breakpoint or deformation of micron-scale etching circuits. Based on traditional laser etching, a micro-airflow array pressurization is proposed by using a micro-flow air bearing through airflow positioning. The objective...

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Detalles Bibliográficos
Autores principales: Chen, Rong, Chen, Zhaojie, Xie, Jin
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10056328/
https://www.ncbi.nlm.nih.gov/pubmed/36985083
http://dx.doi.org/10.3390/mi14030676

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10056328/
https://www.ncbi.nlm.nih.gov/pubmed/36985083
http://dx.doi.org/10.3390/mi14030676

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