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Improved Crystallinity of Annealed 0002 AlN Films on Sapphire Substrate

AlN is a piezoelectric material used in telecommunication applications due to its high surface acoustic wave (SAW) velocity, stability, and mechanical strength. Its performance is linked to film quality, and one method to achieve high-quality films goes through the process of annealing. Consequently...

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Detalles Bibliográficos
Autores principales:	Bersch, Bruno Comis, Caminal Ros, Tomàs, Tollefsen, Vegard, Johannessen, Erik Andrew, Johannessen, Agne
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2023
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10056503/ https://www.ncbi.nlm.nih.gov/pubmed/36984198 http://dx.doi.org/10.3390/ma16062319

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