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Efficient Broadband Light-Trapping Structures on Thin-Film Silicon Fabricated by Laser, Chemical and Hybrid Chemical/Laser Treatments
Light-trapping structures formed on surfaces of various materials have attracted much attention in recent years due to their important role in many applications of science and technology. This article discusses various methods for manufacturing light-trapping “black” silicon, namely laser, chemical...
Autores principales: | , , , , , , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2023
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10056786/ https://www.ncbi.nlm.nih.gov/pubmed/36984230 http://dx.doi.org/10.3390/ma16062350 |
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author | Kovalev, Michael Podlesnykh, Ivan Nastulyavichus, Alena Stsepuro, Nikita Mushkarina, Irina Platonov, Pavel Terukov, Evgeniy Abolmasov, Sergey Dunaev, Aleksandr Akhmatkhanov, Andrey Shur, Vladimir Kudryashov, Sergey |
author_facet | Kovalev, Michael Podlesnykh, Ivan Nastulyavichus, Alena Stsepuro, Nikita Mushkarina, Irina Platonov, Pavel Terukov, Evgeniy Abolmasov, Sergey Dunaev, Aleksandr Akhmatkhanov, Andrey Shur, Vladimir Kudryashov, Sergey |
author_sort | Kovalev, Michael |
collection | PubMed |
description | Light-trapping structures formed on surfaces of various materials have attracted much attention in recent years due to their important role in many applications of science and technology. This article discusses various methods for manufacturing light-trapping “black” silicon, namely laser, chemical and hybrid chemical/laser ones. In addition to the widely explored laser texturing and chemical etching methods, we develop a hybrid chemical/laser texturing method, consisting in laser post-texturing of pyramidal structures obtained after chemical etching. After laser treatments the surface morphology was represented by a chaotic relief of microcones, while after chemical treatment it acquired a chaotic pyramidal relief. Moreover, laser texturing of preliminarily chemically microtextured silicon wafers is shown to take five-fold less time compared to bare flat silicon. In this case, the chemically/laser-treated samples exhibit average total reflectance in the spectral range of 250–1100 nm lower by 7–10% than after the purely chemical treatment. |
format | Online Article Text |
id | pubmed-10056786 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2023 |
publisher | MDPI |
record_format | MEDLINE/PubMed |
spelling | pubmed-100567862023-03-30 Efficient Broadband Light-Trapping Structures on Thin-Film Silicon Fabricated by Laser, Chemical and Hybrid Chemical/Laser Treatments Kovalev, Michael Podlesnykh, Ivan Nastulyavichus, Alena Stsepuro, Nikita Mushkarina, Irina Platonov, Pavel Terukov, Evgeniy Abolmasov, Sergey Dunaev, Aleksandr Akhmatkhanov, Andrey Shur, Vladimir Kudryashov, Sergey Materials (Basel) Article Light-trapping structures formed on surfaces of various materials have attracted much attention in recent years due to their important role in many applications of science and technology. This article discusses various methods for manufacturing light-trapping “black” silicon, namely laser, chemical and hybrid chemical/laser ones. In addition to the widely explored laser texturing and chemical etching methods, we develop a hybrid chemical/laser texturing method, consisting in laser post-texturing of pyramidal structures obtained after chemical etching. After laser treatments the surface morphology was represented by a chaotic relief of microcones, while after chemical treatment it acquired a chaotic pyramidal relief. Moreover, laser texturing of preliminarily chemically microtextured silicon wafers is shown to take five-fold less time compared to bare flat silicon. In this case, the chemically/laser-treated samples exhibit average total reflectance in the spectral range of 250–1100 nm lower by 7–10% than after the purely chemical treatment. MDPI 2023-03-15 /pmc/articles/PMC10056786/ /pubmed/36984230 http://dx.doi.org/10.3390/ma16062350 Text en © 2023 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/). |
spellingShingle | Article Kovalev, Michael Podlesnykh, Ivan Nastulyavichus, Alena Stsepuro, Nikita Mushkarina, Irina Platonov, Pavel Terukov, Evgeniy Abolmasov, Sergey Dunaev, Aleksandr Akhmatkhanov, Andrey Shur, Vladimir Kudryashov, Sergey Efficient Broadband Light-Trapping Structures on Thin-Film Silicon Fabricated by Laser, Chemical and Hybrid Chemical/Laser Treatments |
title | Efficient Broadband Light-Trapping Structures on Thin-Film Silicon Fabricated by Laser, Chemical and Hybrid Chemical/Laser Treatments |
title_full | Efficient Broadband Light-Trapping Structures on Thin-Film Silicon Fabricated by Laser, Chemical and Hybrid Chemical/Laser Treatments |
title_fullStr | Efficient Broadband Light-Trapping Structures on Thin-Film Silicon Fabricated by Laser, Chemical and Hybrid Chemical/Laser Treatments |
title_full_unstemmed | Efficient Broadband Light-Trapping Structures on Thin-Film Silicon Fabricated by Laser, Chemical and Hybrid Chemical/Laser Treatments |
title_short | Efficient Broadband Light-Trapping Structures on Thin-Film Silicon Fabricated by Laser, Chemical and Hybrid Chemical/Laser Treatments |
title_sort | efficient broadband light-trapping structures on thin-film silicon fabricated by laser, chemical and hybrid chemical/laser treatments |
topic | Article |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10056786/ https://www.ncbi.nlm.nih.gov/pubmed/36984230 http://dx.doi.org/10.3390/ma16062350 |
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