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Efficient Broadband Light-Trapping Structures on Thin-Film Silicon Fabricated by Laser, Chemical and Hybrid Chemical/Laser Treatments

Light-trapping structures formed on surfaces of various materials have attracted much attention in recent years due to their important role in many applications of science and technology. This article discusses various methods for manufacturing light-trapping “black” silicon, namely laser, chemical...

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Autores principales: Kovalev, Michael, Podlesnykh, Ivan, Nastulyavichus, Alena, Stsepuro, Nikita, Mushkarina, Irina, Platonov, Pavel, Terukov, Evgeniy, Abolmasov, Sergey, Dunaev, Aleksandr, Akhmatkhanov, Andrey, Shur, Vladimir, Kudryashov, Sergey
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10056786/
https://www.ncbi.nlm.nih.gov/pubmed/36984230
http://dx.doi.org/10.3390/ma16062350
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author Kovalev, Michael
Podlesnykh, Ivan
Nastulyavichus, Alena
Stsepuro, Nikita
Mushkarina, Irina
Platonov, Pavel
Terukov, Evgeniy
Abolmasov, Sergey
Dunaev, Aleksandr
Akhmatkhanov, Andrey
Shur, Vladimir
Kudryashov, Sergey
author_facet Kovalev, Michael
Podlesnykh, Ivan
Nastulyavichus, Alena
Stsepuro, Nikita
Mushkarina, Irina
Platonov, Pavel
Terukov, Evgeniy
Abolmasov, Sergey
Dunaev, Aleksandr
Akhmatkhanov, Andrey
Shur, Vladimir
Kudryashov, Sergey
author_sort Kovalev, Michael
collection PubMed
description Light-trapping structures formed on surfaces of various materials have attracted much attention in recent years due to their important role in many applications of science and technology. This article discusses various methods for manufacturing light-trapping “black” silicon, namely laser, chemical and hybrid chemical/laser ones. In addition to the widely explored laser texturing and chemical etching methods, we develop a hybrid chemical/laser texturing method, consisting in laser post-texturing of pyramidal structures obtained after chemical etching. After laser treatments the surface morphology was represented by a chaotic relief of microcones, while after chemical treatment it acquired a chaotic pyramidal relief. Moreover, laser texturing of preliminarily chemically microtextured silicon wafers is shown to take five-fold less time compared to bare flat silicon. In this case, the chemically/laser-treated samples exhibit average total reflectance in the spectral range of 250–1100 nm lower by 7–10% than after the purely chemical treatment.
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spelling pubmed-100567862023-03-30 Efficient Broadband Light-Trapping Structures on Thin-Film Silicon Fabricated by Laser, Chemical and Hybrid Chemical/Laser Treatments Kovalev, Michael Podlesnykh, Ivan Nastulyavichus, Alena Stsepuro, Nikita Mushkarina, Irina Platonov, Pavel Terukov, Evgeniy Abolmasov, Sergey Dunaev, Aleksandr Akhmatkhanov, Andrey Shur, Vladimir Kudryashov, Sergey Materials (Basel) Article Light-trapping structures formed on surfaces of various materials have attracted much attention in recent years due to their important role in many applications of science and technology. This article discusses various methods for manufacturing light-trapping “black” silicon, namely laser, chemical and hybrid chemical/laser ones. In addition to the widely explored laser texturing and chemical etching methods, we develop a hybrid chemical/laser texturing method, consisting in laser post-texturing of pyramidal structures obtained after chemical etching. After laser treatments the surface morphology was represented by a chaotic relief of microcones, while after chemical treatment it acquired a chaotic pyramidal relief. Moreover, laser texturing of preliminarily chemically microtextured silicon wafers is shown to take five-fold less time compared to bare flat silicon. In this case, the chemically/laser-treated samples exhibit average total reflectance in the spectral range of 250–1100 nm lower by 7–10% than after the purely chemical treatment. MDPI 2023-03-15 /pmc/articles/PMC10056786/ /pubmed/36984230 http://dx.doi.org/10.3390/ma16062350 Text en © 2023 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Kovalev, Michael
Podlesnykh, Ivan
Nastulyavichus, Alena
Stsepuro, Nikita
Mushkarina, Irina
Platonov, Pavel
Terukov, Evgeniy
Abolmasov, Sergey
Dunaev, Aleksandr
Akhmatkhanov, Andrey
Shur, Vladimir
Kudryashov, Sergey
Efficient Broadband Light-Trapping Structures on Thin-Film Silicon Fabricated by Laser, Chemical and Hybrid Chemical/Laser Treatments
title Efficient Broadband Light-Trapping Structures on Thin-Film Silicon Fabricated by Laser, Chemical and Hybrid Chemical/Laser Treatments
title_full Efficient Broadband Light-Trapping Structures on Thin-Film Silicon Fabricated by Laser, Chemical and Hybrid Chemical/Laser Treatments
title_fullStr Efficient Broadband Light-Trapping Structures on Thin-Film Silicon Fabricated by Laser, Chemical and Hybrid Chemical/Laser Treatments
title_full_unstemmed Efficient Broadband Light-Trapping Structures on Thin-Film Silicon Fabricated by Laser, Chemical and Hybrid Chemical/Laser Treatments
title_short Efficient Broadband Light-Trapping Structures on Thin-Film Silicon Fabricated by Laser, Chemical and Hybrid Chemical/Laser Treatments
title_sort efficient broadband light-trapping structures on thin-film silicon fabricated by laser, chemical and hybrid chemical/laser treatments
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10056786/
https://www.ncbi.nlm.nih.gov/pubmed/36984230
http://dx.doi.org/10.3390/ma16062350
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