Multitarget Reactive Magnetron Sputtering towards the Production of Strontium Molybdate Thin Films

X-ray photoelectron spectroscopy was used to study the direct synthesis of strontium and molybdenum oxide thin films deposited by multitarget reactive magnetron sputtering (MT-RMS). Sr and Mo targets with a purity of 99.9% and 99.5%, respectively, were co-sputtered in an argon–oxygen gas mixture. Th...

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Detalles Bibliográficos
Autores principales: Andrulevičius, Mindaugas, Artiukh, Evgenii, Suchaneck, Gunnar, Wang, Sitao, Sobolev, Nikolai A., Gerlach, Gerald, Tamulevičienė, Asta, Abakevičienė, Brigita, Tamulevičius, Sigitas
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10056819/
https://www.ncbi.nlm.nih.gov/pubmed/36984054
http://dx.doi.org/10.3390/ma16062175

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10056819/
https://www.ncbi.nlm.nih.gov/pubmed/36984054
http://dx.doi.org/10.3390/ma16062175

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