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Acoustic Sensing Performance Investigation Based on Grooves Etched in the Ring Resonators

Acoustic detection based on optical technology has moved in the direction of high sensitivity and resolution. In this study, an optical waveguide acoustic sensor based on a ring resonator with the evanescent field is proposed. Grooves are introduced into the ring resonators as a direct sensitive str...

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Autores principales: Han, Yuan, Zheng, Yongqiu, Li, Nan, Luo, Yifan, Xue, Chenyang, Bai, Jiandong, Chen, Jiamin
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10056882/
https://www.ncbi.nlm.nih.gov/pubmed/36984918
http://dx.doi.org/10.3390/mi14030512
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author Han, Yuan
Zheng, Yongqiu
Li, Nan
Luo, Yifan
Xue, Chenyang
Bai, Jiandong
Chen, Jiamin
author_facet Han, Yuan
Zheng, Yongqiu
Li, Nan
Luo, Yifan
Xue, Chenyang
Bai, Jiandong
Chen, Jiamin
author_sort Han, Yuan
collection PubMed
description Acoustic detection based on optical technology has moved in the direction of high sensitivity and resolution. In this study, an optical waveguide acoustic sensor based on a ring resonator with the evanescent field is proposed. Grooves are introduced into the ring resonators as a direct sensitive structure to excite the evanescent field. A series of resonators with diverse grooves are fabricated for a comparative analysis of acoustic performance. The acoustic parameters of bandwidth, sensitivity, and signal-to-noise ratio (SNR) vary with different grooves indicated by the Q-factor. The results show that the ring resonators with variable-sized grooves exhibit excellent capability of acoustics detection. A maximum frequency of 160 kHz and a high sensitivity of 60.075 mV/Pa is achieved, with the minimum detectable sound pressure being 131.34 µPa/Hz(1/2). Furthermore, the resonators with high Q-factors represent a remarkable sound resolution reaching 0.2 Hz. This work is of great significance for optimizing acoustic sensors and broadening the application range.
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spelling pubmed-100568822023-03-30 Acoustic Sensing Performance Investigation Based on Grooves Etched in the Ring Resonators Han, Yuan Zheng, Yongqiu Li, Nan Luo, Yifan Xue, Chenyang Bai, Jiandong Chen, Jiamin Micromachines (Basel) Article Acoustic detection based on optical technology has moved in the direction of high sensitivity and resolution. In this study, an optical waveguide acoustic sensor based on a ring resonator with the evanescent field is proposed. Grooves are introduced into the ring resonators as a direct sensitive structure to excite the evanescent field. A series of resonators with diverse grooves are fabricated for a comparative analysis of acoustic performance. The acoustic parameters of bandwidth, sensitivity, and signal-to-noise ratio (SNR) vary with different grooves indicated by the Q-factor. The results show that the ring resonators with variable-sized grooves exhibit excellent capability of acoustics detection. A maximum frequency of 160 kHz and a high sensitivity of 60.075 mV/Pa is achieved, with the minimum detectable sound pressure being 131.34 µPa/Hz(1/2). Furthermore, the resonators with high Q-factors represent a remarkable sound resolution reaching 0.2 Hz. This work is of great significance for optimizing acoustic sensors and broadening the application range. MDPI 2023-02-22 /pmc/articles/PMC10056882/ /pubmed/36984918 http://dx.doi.org/10.3390/mi14030512 Text en © 2023 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Han, Yuan
Zheng, Yongqiu
Li, Nan
Luo, Yifan
Xue, Chenyang
Bai, Jiandong
Chen, Jiamin
Acoustic Sensing Performance Investigation Based on Grooves Etched in the Ring Resonators
title Acoustic Sensing Performance Investigation Based on Grooves Etched in the Ring Resonators
title_full Acoustic Sensing Performance Investigation Based on Grooves Etched in the Ring Resonators
title_fullStr Acoustic Sensing Performance Investigation Based on Grooves Etched in the Ring Resonators
title_full_unstemmed Acoustic Sensing Performance Investigation Based on Grooves Etched in the Ring Resonators
title_short Acoustic Sensing Performance Investigation Based on Grooves Etched in the Ring Resonators
title_sort acoustic sensing performance investigation based on grooves etched in the ring resonators
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10056882/
https://www.ncbi.nlm.nih.gov/pubmed/36984918
http://dx.doi.org/10.3390/mi14030512
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