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Acoustic Sensing Performance Investigation Based on Grooves Etched in the Ring Resonators
Acoustic detection based on optical technology has moved in the direction of high sensitivity and resolution. In this study, an optical waveguide acoustic sensor based on a ring resonator with the evanescent field is proposed. Grooves are introduced into the ring resonators as a direct sensitive str...
Autores principales: | , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2023
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10056882/ https://www.ncbi.nlm.nih.gov/pubmed/36984918 http://dx.doi.org/10.3390/mi14030512 |
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author | Han, Yuan Zheng, Yongqiu Li, Nan Luo, Yifan Xue, Chenyang Bai, Jiandong Chen, Jiamin |
author_facet | Han, Yuan Zheng, Yongqiu Li, Nan Luo, Yifan Xue, Chenyang Bai, Jiandong Chen, Jiamin |
author_sort | Han, Yuan |
collection | PubMed |
description | Acoustic detection based on optical technology has moved in the direction of high sensitivity and resolution. In this study, an optical waveguide acoustic sensor based on a ring resonator with the evanescent field is proposed. Grooves are introduced into the ring resonators as a direct sensitive structure to excite the evanescent field. A series of resonators with diverse grooves are fabricated for a comparative analysis of acoustic performance. The acoustic parameters of bandwidth, sensitivity, and signal-to-noise ratio (SNR) vary with different grooves indicated by the Q-factor. The results show that the ring resonators with variable-sized grooves exhibit excellent capability of acoustics detection. A maximum frequency of 160 kHz and a high sensitivity of 60.075 mV/Pa is achieved, with the minimum detectable sound pressure being 131.34 µPa/Hz(1/2). Furthermore, the resonators with high Q-factors represent a remarkable sound resolution reaching 0.2 Hz. This work is of great significance for optimizing acoustic sensors and broadening the application range. |
format | Online Article Text |
id | pubmed-10056882 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2023 |
publisher | MDPI |
record_format | MEDLINE/PubMed |
spelling | pubmed-100568822023-03-30 Acoustic Sensing Performance Investigation Based on Grooves Etched in the Ring Resonators Han, Yuan Zheng, Yongqiu Li, Nan Luo, Yifan Xue, Chenyang Bai, Jiandong Chen, Jiamin Micromachines (Basel) Article Acoustic detection based on optical technology has moved in the direction of high sensitivity and resolution. In this study, an optical waveguide acoustic sensor based on a ring resonator with the evanescent field is proposed. Grooves are introduced into the ring resonators as a direct sensitive structure to excite the evanescent field. A series of resonators with diverse grooves are fabricated for a comparative analysis of acoustic performance. The acoustic parameters of bandwidth, sensitivity, and signal-to-noise ratio (SNR) vary with different grooves indicated by the Q-factor. The results show that the ring resonators with variable-sized grooves exhibit excellent capability of acoustics detection. A maximum frequency of 160 kHz and a high sensitivity of 60.075 mV/Pa is achieved, with the minimum detectable sound pressure being 131.34 µPa/Hz(1/2). Furthermore, the resonators with high Q-factors represent a remarkable sound resolution reaching 0.2 Hz. This work is of great significance for optimizing acoustic sensors and broadening the application range. MDPI 2023-02-22 /pmc/articles/PMC10056882/ /pubmed/36984918 http://dx.doi.org/10.3390/mi14030512 Text en © 2023 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/). |
spellingShingle | Article Han, Yuan Zheng, Yongqiu Li, Nan Luo, Yifan Xue, Chenyang Bai, Jiandong Chen, Jiamin Acoustic Sensing Performance Investigation Based on Grooves Etched in the Ring Resonators |
title | Acoustic Sensing Performance Investigation Based on Grooves Etched in the Ring Resonators |
title_full | Acoustic Sensing Performance Investigation Based on Grooves Etched in the Ring Resonators |
title_fullStr | Acoustic Sensing Performance Investigation Based on Grooves Etched in the Ring Resonators |
title_full_unstemmed | Acoustic Sensing Performance Investigation Based on Grooves Etched in the Ring Resonators |
title_short | Acoustic Sensing Performance Investigation Based on Grooves Etched in the Ring Resonators |
title_sort | acoustic sensing performance investigation based on grooves etched in the ring resonators |
topic | Article |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10056882/ https://www.ncbi.nlm.nih.gov/pubmed/36984918 http://dx.doi.org/10.3390/mi14030512 |
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