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Structure and Technological Parameters’ Effect on MISFET-Based Hydrogen Sensors’ Characteristics

The influence of structure and technological parameters (STPs) on the metrological characteristics of hydrogen sensors based on MISFETs has been investigated. Compact electrophysical and electrical models connecting the drain current, the voltage between the drain and the source and the voltage betw...

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Detalles Bibliográficos
Autores principales:	Podlepetsky, Boris, Samotaev, Nikolay, Etrekova, Maya, Litvinov, Artur
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2023
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10056915/ https://www.ncbi.nlm.nih.gov/pubmed/36991983 http://dx.doi.org/10.3390/s23063273

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