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A High Sensitivity AlN-Based MEMS Hydrophone for Pipeline Leak Monitoring

In this work, a miniaturized, low-cost, low-power and high-sensitivity AlN-based micro-electro-mechanical system (MEMS) hydrophone is proposed for monitoring water pipeline leaks. The proposed MEMS Hydrophone consists of a piezoelectric micromachined ultrasonic transducer (PMUT) array, an acoustic m...

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Detalles Bibliográficos
Autores principales:	Zhi, Baoyu, Wu, Zhipeng, Chen, Caihui, Chen, Minkan, Ding, Xiaoxia, Lou, Liang
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2023
Materias:	Communication
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10057001/ https://www.ncbi.nlm.nih.gov/pubmed/36985061 http://dx.doi.org/10.3390/mi14030654

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