A Piezoelectric MEMS Speaker with a Combined Function of a Silent Alarm

To explore the versatility of speakers, a piezoelectric micro-electro-mechanical system (MEMS) speaker combining the function of a silent alarm is proposed, which mainly comprises a lead zirconate titanate (PZT) actuation layer and a rigid–flexible coupling supporting layer. Measurements performed o...

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Detalles Bibliográficos
Autores principales: Wang, Qi, Ruan, Tao, Xu, Qingda, Hu, Zhiyong, Yang, Bin, You, Minmin, Lin, Zude, Liu, Jingquan
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10057705/
https://www.ncbi.nlm.nih.gov/pubmed/36985109
http://dx.doi.org/10.3390/mi14030702

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10057705/
https://www.ncbi.nlm.nih.gov/pubmed/36985109
http://dx.doi.org/10.3390/mi14030702

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