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A Piezoelectric MEMS Speaker with a Combined Function of a Silent Alarm
To explore the versatility of speakers, a piezoelectric micro-electro-mechanical system (MEMS) speaker combining the function of a silent alarm is proposed, which mainly comprises a lead zirconate titanate (PZT) actuation layer and a rigid–flexible coupling supporting layer. Measurements performed o...
| Autores principales: | , , , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2023
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10057705/ https://www.ncbi.nlm.nih.gov/pubmed/36985109 http://dx.doi.org/10.3390/mi14030702 |