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Process Development for Batch Production of Micro-Milling Tools Made of Silicon Carbide by Means of the Dry Etching Process

Downsized and complex micro-machining structures have to meet quality requirements concerning geometry and convince through increasing functionality. The development and use of cutting tools in the sub-millimeter range can meet these demands and contribute to the production of intelligent components...

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Detalles Bibliográficos
Autores principales:	Wittek, Christian-G. R., Steinhoff, Lukas, Raumel, Selina, Reißfelder, Michael, Dencker, Folke, Wurz, Marc C.
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2023
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10058442/ https://www.ncbi.nlm.nih.gov/pubmed/36984985 http://dx.doi.org/10.3390/mi14030580

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