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Aluminum Nitride Out-of-Plane Piezoelectric MEMS Actuators

Integrating microelectromechanical systems (MEMS) actuators with low-loss suspended silicon nitride waveguides enables the precise alignment of these waveguides to other photonic integrated circuits (PICs). This requires both in-plane and out-of-plane actuators to ensure high-precision optical align...

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Detalles Bibliográficos
Autores principales:	Rabih, Almur A. S., Kazemi, Mohammad, Ménard, Michaël, Nabki, Frederic
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2023
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10059770/ https://www.ncbi.nlm.nih.gov/pubmed/36985106 http://dx.doi.org/10.3390/mi14030700

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