Deep multilevel wet etching of fused silica glass microstructures in BOE solution

Fused silica glass is a material of choice for micromechanical, microfluidic, and optical devices due to its chemical resistance, optical, electrical, and mechanical performance. Wet etching is the key method for fabricating of such microdevices. Protective mask integrity is a big challenge due extr...

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Detalles Bibliográficos
Autores principales: Konstantinova, T. G., Andronic, M. M., Baklykov, D. A., Stukalova, V. E., Ezenkova, D. A., Zikiy, E. V., Bashinova, M. V., Solovev, A. A., Lotkov, E. S., Ryzhikov, I. A., Rodionov, I. A.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10063648/
https://www.ncbi.nlm.nih.gov/pubmed/36997654
http://dx.doi.org/10.1038/s41598-023-32503-w

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