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On-chip wavelength division multiplexing filters using extremely efficient gate-driven silicon microring resonator array
Silicon microring resonators (Si-MRRs) play essential roles in on-chip wavelength division multiplexing (WDM) systems due to their ultra-compact size and low energy consumption. However, the resonant wavelength of Si-MRRs is very sensitive to temperature fluctuations and fabrication process variatio...
Autores principales: | , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Nature Publishing Group UK
2023
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10066274/ https://www.ncbi.nlm.nih.gov/pubmed/37002281 http://dx.doi.org/10.1038/s41598-023-32313-0 |
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author | Hsu, Wei-Che Nujhat, Nabila Kupp, Benjamin Conley, John F. Wang, Alan X. |
author_facet | Hsu, Wei-Che Nujhat, Nabila Kupp, Benjamin Conley, John F. Wang, Alan X. |
author_sort | Hsu, Wei-Che |
collection | PubMed |
description | Silicon microring resonators (Si-MRRs) play essential roles in on-chip wavelength division multiplexing (WDM) systems due to their ultra-compact size and low energy consumption. However, the resonant wavelength of Si-MRRs is very sensitive to temperature fluctuations and fabrication process variation. Typically, each Si-MRR in the WDM system requires precise wavelength control by free carrier injection using PIN diodes or thermal heaters that consume high power. This work experimentally demonstrates gate-tuning on-chip WDM filters for the first time with large wavelength coverage for the entire channel spacing using a Si-MRR array driven by high mobility titanium-doped indium oxide (ITiO) gates. The integrated Si-MRRs achieve unprecedented wavelength tunability up to 589 pm/V, or V(π)L of 0.050 V cm with a high-quality factor of 5200. The on-chip WDM filters, which consist of four cascaded ITiO-driven Si-MRRs, can be continuously tuned across the 1543–1548 nm wavelength range by gate biases with near-zero power consumption. |
format | Online Article Text |
id | pubmed-10066274 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2023 |
publisher | Nature Publishing Group UK |
record_format | MEDLINE/PubMed |
spelling | pubmed-100662742023-04-02 On-chip wavelength division multiplexing filters using extremely efficient gate-driven silicon microring resonator array Hsu, Wei-Che Nujhat, Nabila Kupp, Benjamin Conley, John F. Wang, Alan X. Sci Rep Article Silicon microring resonators (Si-MRRs) play essential roles in on-chip wavelength division multiplexing (WDM) systems due to their ultra-compact size and low energy consumption. However, the resonant wavelength of Si-MRRs is very sensitive to temperature fluctuations and fabrication process variation. Typically, each Si-MRR in the WDM system requires precise wavelength control by free carrier injection using PIN diodes or thermal heaters that consume high power. This work experimentally demonstrates gate-tuning on-chip WDM filters for the first time with large wavelength coverage for the entire channel spacing using a Si-MRR array driven by high mobility titanium-doped indium oxide (ITiO) gates. The integrated Si-MRRs achieve unprecedented wavelength tunability up to 589 pm/V, or V(π)L of 0.050 V cm with a high-quality factor of 5200. The on-chip WDM filters, which consist of four cascaded ITiO-driven Si-MRRs, can be continuously tuned across the 1543–1548 nm wavelength range by gate biases with near-zero power consumption. Nature Publishing Group UK 2023-03-31 /pmc/articles/PMC10066274/ /pubmed/37002281 http://dx.doi.org/10.1038/s41598-023-32313-0 Text en © The Author(s) 2023 https://creativecommons.org/licenses/by/4.0/Open Access This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons licence, and indicate if changes were made. The images or other third party material in this article are included in the article's Creative Commons licence, unless indicated otherwise in a credit line to the material. If material is not included in the article's Creative Commons licence and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this licence, visit http://creativecommons.org/licenses/by/4.0/ (https://creativecommons.org/licenses/by/4.0/) . |
spellingShingle | Article Hsu, Wei-Che Nujhat, Nabila Kupp, Benjamin Conley, John F. Wang, Alan X. On-chip wavelength division multiplexing filters using extremely efficient gate-driven silicon microring resonator array |
title | On-chip wavelength division multiplexing filters using extremely efficient gate-driven silicon microring resonator array |
title_full | On-chip wavelength division multiplexing filters using extremely efficient gate-driven silicon microring resonator array |
title_fullStr | On-chip wavelength division multiplexing filters using extremely efficient gate-driven silicon microring resonator array |
title_full_unstemmed | On-chip wavelength division multiplexing filters using extremely efficient gate-driven silicon microring resonator array |
title_short | On-chip wavelength division multiplexing filters using extremely efficient gate-driven silicon microring resonator array |
title_sort | on-chip wavelength division multiplexing filters using extremely efficient gate-driven silicon microring resonator array |
topic | Article |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10066274/ https://www.ncbi.nlm.nih.gov/pubmed/37002281 http://dx.doi.org/10.1038/s41598-023-32313-0 |
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