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Charge Density-Based Pyroelectric Vacuum Sensor
A traditional thermal conductivity vacuum gauge mainly detects low pressure (the degree of vacuum) by measuring the temperature change of a filament heated by the electric current. We propose a novel pyroelectric vacuum sensor that utilizes the effect of ambient thermal conductivity on the pyroelect...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
AAAS
2023
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10076003/ https://www.ncbi.nlm.nih.gov/pubmed/37040496 http://dx.doi.org/10.34133/research.0028 |