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Processing Optimization of Shear Thickening Fluid Assisted Micro-Ultrasonic Machining Method for Hemispherical Mold Based on Integrated CatBoost-GA Model

Micro-electro-mechanical systems (MEMS) hemispherical resonant gyroscopes are used in a wide range of applications in defense technology, electronics, aerospace, etc. The surface roughness of the silicon micro-hemisphere concave molds (CMs) inside the MEMS hemispherical resonant gyroscope is the mai...

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Autores principales: Yin, Jiateng, Zhao, Jun, Song, Fengqi, Xu, Xinqiang, Lan, Yeshen
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10095837/
https://www.ncbi.nlm.nih.gov/pubmed/37048976
http://dx.doi.org/10.3390/ma16072683
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author Yin, Jiateng
Zhao, Jun
Song, Fengqi
Xu, Xinqiang
Lan, Yeshen
author_facet Yin, Jiateng
Zhao, Jun
Song, Fengqi
Xu, Xinqiang
Lan, Yeshen
author_sort Yin, Jiateng
collection PubMed
description Micro-electro-mechanical systems (MEMS) hemispherical resonant gyroscopes are used in a wide range of applications in defense technology, electronics, aerospace, etc. The surface roughness of the silicon micro-hemisphere concave molds (CMs) inside the MEMS hemispherical resonant gyroscope is the main factor affecting the performance of the gyroscope. Therefore, a new method for reducing the surface roughness of the micro-CM needs to be developed. Micro-ultrasonic machining (MUM) has proven to be an excellent method for machining micro-CMs; shear thickening fluids (STFs) have also been used in the ultra-precision polishing field due to their perfect processing performance. Ultimately, an STF-MUM polishing method that combines STF with MUM is proposed to improve the surface roughness of the micro-CM. In order to achieve the excellent processing performance of the new technology, a Categorical Boosting (CatBoost)-genetic algorithm (GA) optimization model was developed to optimize the processing parameters. The results of optimizing the processing parameters via the CatBoost-GA model were verified by five groups of independent repeated experiments. The maximum absolute error of CatBoost-GA is 7.21%, the average absolute error is 4.69%, and the minimum surface roughness is reduced by 28.72% compared to the minimum value of the experimental results without optimization.
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spelling pubmed-100958372023-04-13 Processing Optimization of Shear Thickening Fluid Assisted Micro-Ultrasonic Machining Method for Hemispherical Mold Based on Integrated CatBoost-GA Model Yin, Jiateng Zhao, Jun Song, Fengqi Xu, Xinqiang Lan, Yeshen Materials (Basel) Article Micro-electro-mechanical systems (MEMS) hemispherical resonant gyroscopes are used in a wide range of applications in defense technology, electronics, aerospace, etc. The surface roughness of the silicon micro-hemisphere concave molds (CMs) inside the MEMS hemispherical resonant gyroscope is the main factor affecting the performance of the gyroscope. Therefore, a new method for reducing the surface roughness of the micro-CM needs to be developed. Micro-ultrasonic machining (MUM) has proven to be an excellent method for machining micro-CMs; shear thickening fluids (STFs) have also been used in the ultra-precision polishing field due to their perfect processing performance. Ultimately, an STF-MUM polishing method that combines STF with MUM is proposed to improve the surface roughness of the micro-CM. In order to achieve the excellent processing performance of the new technology, a Categorical Boosting (CatBoost)-genetic algorithm (GA) optimization model was developed to optimize the processing parameters. The results of optimizing the processing parameters via the CatBoost-GA model were verified by five groups of independent repeated experiments. The maximum absolute error of CatBoost-GA is 7.21%, the average absolute error is 4.69%, and the minimum surface roughness is reduced by 28.72% compared to the minimum value of the experimental results without optimization. MDPI 2023-03-28 /pmc/articles/PMC10095837/ /pubmed/37048976 http://dx.doi.org/10.3390/ma16072683 Text en © 2023 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Yin, Jiateng
Zhao, Jun
Song, Fengqi
Xu, Xinqiang
Lan, Yeshen
Processing Optimization of Shear Thickening Fluid Assisted Micro-Ultrasonic Machining Method for Hemispherical Mold Based on Integrated CatBoost-GA Model
title Processing Optimization of Shear Thickening Fluid Assisted Micro-Ultrasonic Machining Method for Hemispherical Mold Based on Integrated CatBoost-GA Model
title_full Processing Optimization of Shear Thickening Fluid Assisted Micro-Ultrasonic Machining Method for Hemispherical Mold Based on Integrated CatBoost-GA Model
title_fullStr Processing Optimization of Shear Thickening Fluid Assisted Micro-Ultrasonic Machining Method for Hemispherical Mold Based on Integrated CatBoost-GA Model
title_full_unstemmed Processing Optimization of Shear Thickening Fluid Assisted Micro-Ultrasonic Machining Method for Hemispherical Mold Based on Integrated CatBoost-GA Model
title_short Processing Optimization of Shear Thickening Fluid Assisted Micro-Ultrasonic Machining Method for Hemispherical Mold Based on Integrated CatBoost-GA Model
title_sort processing optimization of shear thickening fluid assisted micro-ultrasonic machining method for hemispherical mold based on integrated catboost-ga model
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10095837/
https://www.ncbi.nlm.nih.gov/pubmed/37048976
http://dx.doi.org/10.3390/ma16072683
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