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Processing Optimization of Shear Thickening Fluid Assisted Micro-Ultrasonic Machining Method for Hemispherical Mold Based on Integrated CatBoost-GA Model

Micro-electro-mechanical systems (MEMS) hemispherical resonant gyroscopes are used in a wide range of applications in defense technology, electronics, aerospace, etc. The surface roughness of the silicon micro-hemisphere concave molds (CMs) inside the MEMS hemispherical resonant gyroscope is the mai...

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Detalles Bibliográficos
Autores principales:	Yin, Jiateng, Zhao, Jun, Song, Fengqi, Xu, Xinqiang, Lan, Yeshen
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2023
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10095837/ https://www.ncbi.nlm.nih.gov/pubmed/37048976 http://dx.doi.org/10.3390/ma16072683

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