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Thin and Scalable Hybrid Emission Filter via Plasma Etching for Low-Invasive Fluorescence Detection

Hybrid emission filters, comprising an interference filter and an absorption filter, exhibit high excitation light rejection performance and can act as lensless fluorescent devices. However, it has been challenging to produce them in large batches over a large area. In this study, we propose and dem...

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Autores principales: Rustami, Erus, Sasagawa, Kiyotaka, Sugie, Kenji, Ohta, Yasumi, Takehara, Hironari, Haruta, Makito, Tashiro, Hiroyuki, Ohta, Jun
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10098729/
https://www.ncbi.nlm.nih.gov/pubmed/37050755
http://dx.doi.org/10.3390/s23073695
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author Rustami, Erus
Sasagawa, Kiyotaka
Sugie, Kenji
Ohta, Yasumi
Takehara, Hironari
Haruta, Makito
Tashiro, Hiroyuki
Ohta, Jun
author_facet Rustami, Erus
Sasagawa, Kiyotaka
Sugie, Kenji
Ohta, Yasumi
Takehara, Hironari
Haruta, Makito
Tashiro, Hiroyuki
Ohta, Jun
author_sort Rustami, Erus
collection PubMed
description Hybrid emission filters, comprising an interference filter and an absorption filter, exhibit high excitation light rejection performance and can act as lensless fluorescent devices. However, it has been challenging to produce them in large batches over a large area. In this study, we propose and demonstrate a method for transferring a Si substrate, on which the hybrid filter is deposited, onto an image sensor by attaching it to the sensor and removing the substrate via plasma etching. Through this method, we can transfer uniform filters onto fine micrometer-sized needle devices and millimeter-sized multisensor chips. Optical evaluation reveals that the hybrid filter emits light in the 500 to 560 nm range, close to the emission region of green fluorescent protein (GFP). Furthermore, by observing the fluorescence emission from the microbeads, a spatial resolution of 12.11 μm is calculated. In vitro experiments confirm that the fabricated device is able to discriminate GFP emission patterns from brain slices.
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spelling pubmed-100987292023-04-14 Thin and Scalable Hybrid Emission Filter via Plasma Etching for Low-Invasive Fluorescence Detection Rustami, Erus Sasagawa, Kiyotaka Sugie, Kenji Ohta, Yasumi Takehara, Hironari Haruta, Makito Tashiro, Hiroyuki Ohta, Jun Sensors (Basel) Article Hybrid emission filters, comprising an interference filter and an absorption filter, exhibit high excitation light rejection performance and can act as lensless fluorescent devices. However, it has been challenging to produce them in large batches over a large area. In this study, we propose and demonstrate a method for transferring a Si substrate, on which the hybrid filter is deposited, onto an image sensor by attaching it to the sensor and removing the substrate via plasma etching. Through this method, we can transfer uniform filters onto fine micrometer-sized needle devices and millimeter-sized multisensor chips. Optical evaluation reveals that the hybrid filter emits light in the 500 to 560 nm range, close to the emission region of green fluorescent protein (GFP). Furthermore, by observing the fluorescence emission from the microbeads, a spatial resolution of 12.11 μm is calculated. In vitro experiments confirm that the fabricated device is able to discriminate GFP emission patterns from brain slices. MDPI 2023-04-03 /pmc/articles/PMC10098729/ /pubmed/37050755 http://dx.doi.org/10.3390/s23073695 Text en © 2023 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Rustami, Erus
Sasagawa, Kiyotaka
Sugie, Kenji
Ohta, Yasumi
Takehara, Hironari
Haruta, Makito
Tashiro, Hiroyuki
Ohta, Jun
Thin and Scalable Hybrid Emission Filter via Plasma Etching for Low-Invasive Fluorescence Detection
title Thin and Scalable Hybrid Emission Filter via Plasma Etching for Low-Invasive Fluorescence Detection
title_full Thin and Scalable Hybrid Emission Filter via Plasma Etching for Low-Invasive Fluorescence Detection
title_fullStr Thin and Scalable Hybrid Emission Filter via Plasma Etching for Low-Invasive Fluorescence Detection
title_full_unstemmed Thin and Scalable Hybrid Emission Filter via Plasma Etching for Low-Invasive Fluorescence Detection
title_short Thin and Scalable Hybrid Emission Filter via Plasma Etching for Low-Invasive Fluorescence Detection
title_sort thin and scalable hybrid emission filter via plasma etching for low-invasive fluorescence detection
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10098729/
https://www.ncbi.nlm.nih.gov/pubmed/37050755
http://dx.doi.org/10.3390/s23073695
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