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A 0.82 μVrms ultralow 1/f noise bandgap reference for a MEMS gyroscope
High-precision microelectromechanical system (MEMS) gyroscopes are significant in many applications. Bias instability (BI) is an important parameter that indicates the performance of a MEMS gyroscope and is affected by the 1/f noise of the MEMS resonator and readout circuit. Since the bandgap refere...
Autores principales: | , , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
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Nature Publishing Group UK
2023
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10106465/ https://www.ncbi.nlm.nih.gov/pubmed/37077933 http://dx.doi.org/10.1038/s41378-023-00505-3 |
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author | Zou, Junjun Wei, Qi Ju, Chunge Liao, Hua Gu, Haoyu Xing, Bowen Zhou, Bin Zhang, Rong |
author_facet | Zou, Junjun Wei, Qi Ju, Chunge Liao, Hua Gu, Haoyu Xing, Bowen Zhou, Bin Zhang, Rong |
author_sort | Zou, Junjun |
collection | PubMed |
description | High-precision microelectromechanical system (MEMS) gyroscopes are significant in many applications. Bias instability (BI) is an important parameter that indicates the performance of a MEMS gyroscope and is affected by the 1/f noise of the MEMS resonator and readout circuit. Since the bandgap reference (BGR) is an important block in the readout circuit, reducing its 1/f noise is key to improving a gyroscope’s BI. In a traditional BGR, the error amplifier is applied to provide a virtual short-circuit point, but it introduces the main low-frequency noise sources. This paper proposes an ultralow 1/f noise BGR by removing the error amplifier and applying an optimized circuit topology. In addition, a simplified but accurate noise model of the proposed BGR is obtained to optimize the BGR’s output noise performance. To verify this design, the proposed BGR has been implemented in a 180 nm CMOS process with a chip area of 545 × 423 μm. The experimental results show that the BGR’s output integrated noise from 0.1 to 10 Hz is 0.82 μV and the thermal noise is 35 nV/√Hz. Furthermore, bias stability tests of the MEMS gyroscope fabricated in our laboratory with the proposed BGR and some commercial BGRs are carried out. Statistical results show that reducing the BGR’s 1/f noise can nearly linearly improve the gyroscope’s BI. |
format | Online Article Text |
id | pubmed-10106465 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2023 |
publisher | Nature Publishing Group UK |
record_format | MEDLINE/PubMed |
spelling | pubmed-101064652023-04-18 A 0.82 μVrms ultralow 1/f noise bandgap reference for a MEMS gyroscope Zou, Junjun Wei, Qi Ju, Chunge Liao, Hua Gu, Haoyu Xing, Bowen Zhou, Bin Zhang, Rong Microsyst Nanoeng Article High-precision microelectromechanical system (MEMS) gyroscopes are significant in many applications. Bias instability (BI) is an important parameter that indicates the performance of a MEMS gyroscope and is affected by the 1/f noise of the MEMS resonator and readout circuit. Since the bandgap reference (BGR) is an important block in the readout circuit, reducing its 1/f noise is key to improving a gyroscope’s BI. In a traditional BGR, the error amplifier is applied to provide a virtual short-circuit point, but it introduces the main low-frequency noise sources. This paper proposes an ultralow 1/f noise BGR by removing the error amplifier and applying an optimized circuit topology. In addition, a simplified but accurate noise model of the proposed BGR is obtained to optimize the BGR’s output noise performance. To verify this design, the proposed BGR has been implemented in a 180 nm CMOS process with a chip area of 545 × 423 μm. The experimental results show that the BGR’s output integrated noise from 0.1 to 10 Hz is 0.82 μV and the thermal noise is 35 nV/√Hz. Furthermore, bias stability tests of the MEMS gyroscope fabricated in our laboratory with the proposed BGR and some commercial BGRs are carried out. Statistical results show that reducing the BGR’s 1/f noise can nearly linearly improve the gyroscope’s BI. Nature Publishing Group UK 2023-04-17 /pmc/articles/PMC10106465/ /pubmed/37077933 http://dx.doi.org/10.1038/s41378-023-00505-3 Text en © The Author(s) 2023 https://creativecommons.org/licenses/by/4.0/Open Access This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in a credit line to the material. If material is not included in the article’s Creative Commons license and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/ (https://creativecommons.org/licenses/by/4.0/) . |
spellingShingle | Article Zou, Junjun Wei, Qi Ju, Chunge Liao, Hua Gu, Haoyu Xing, Bowen Zhou, Bin Zhang, Rong A 0.82 μVrms ultralow 1/f noise bandgap reference for a MEMS gyroscope |
title | A 0.82 μVrms ultralow 1/f noise bandgap reference for a MEMS gyroscope |
title_full | A 0.82 μVrms ultralow 1/f noise bandgap reference for a MEMS gyroscope |
title_fullStr | A 0.82 μVrms ultralow 1/f noise bandgap reference for a MEMS gyroscope |
title_full_unstemmed | A 0.82 μVrms ultralow 1/f noise bandgap reference for a MEMS gyroscope |
title_short | A 0.82 μVrms ultralow 1/f noise bandgap reference for a MEMS gyroscope |
title_sort | 0.82 μvrms ultralow 1/f noise bandgap reference for a mems gyroscope |
topic | Article |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10106465/ https://www.ncbi.nlm.nih.gov/pubmed/37077933 http://dx.doi.org/10.1038/s41378-023-00505-3 |
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