Cargando…

A 0.82 μVrms ultralow 1/f noise bandgap reference for a MEMS gyroscope

High-precision microelectromechanical system (MEMS) gyroscopes are significant in many applications. Bias instability (BI) is an important parameter that indicates the performance of a MEMS gyroscope and is affected by the 1/f noise of the MEMS resonator and readout circuit. Since the bandgap refere...

Descripción completa

Detalles Bibliográficos
Autores principales: Zou, Junjun, Wei, Qi, Ju, Chunge, Liao, Hua, Gu, Haoyu, Xing, Bowen, Zhou, Bin, Zhang, Rong
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2023
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10106465/
https://www.ncbi.nlm.nih.gov/pubmed/37077933
http://dx.doi.org/10.1038/s41378-023-00505-3
_version_ 1785026419649150976
author Zou, Junjun
Wei, Qi
Ju, Chunge
Liao, Hua
Gu, Haoyu
Xing, Bowen
Zhou, Bin
Zhang, Rong
author_facet Zou, Junjun
Wei, Qi
Ju, Chunge
Liao, Hua
Gu, Haoyu
Xing, Bowen
Zhou, Bin
Zhang, Rong
author_sort Zou, Junjun
collection PubMed
description High-precision microelectromechanical system (MEMS) gyroscopes are significant in many applications. Bias instability (BI) is an important parameter that indicates the performance of a MEMS gyroscope and is affected by the 1/f noise of the MEMS resonator and readout circuit. Since the bandgap reference (BGR) is an important block in the readout circuit, reducing its 1/f noise is key to improving a gyroscope’s BI. In a traditional BGR, the error amplifier is applied to provide a virtual short-circuit point, but it introduces the main low-frequency noise sources. This paper proposes an ultralow 1/f noise BGR by removing the error amplifier and applying an optimized circuit topology. In addition, a simplified but accurate noise model of the proposed BGR is obtained to optimize the BGR’s output noise performance. To verify this design, the proposed BGR has been implemented in a 180 nm CMOS process with a chip area of 545 × 423 μm. The experimental results show that the BGR’s output integrated noise from 0.1 to 10 Hz is 0.82 μV and the thermal noise is 35 nV/√Hz. Furthermore, bias stability tests of the MEMS gyroscope fabricated in our laboratory with the proposed BGR and some commercial BGRs are carried out. Statistical results show that reducing the BGR’s 1/f noise can nearly linearly improve the gyroscope’s BI.
format Online
Article
Text
id pubmed-10106465
institution National Center for Biotechnology Information
language English
publishDate 2023
publisher Nature Publishing Group UK
record_format MEDLINE/PubMed
spelling pubmed-101064652023-04-18 A 0.82 μVrms ultralow 1/f noise bandgap reference for a MEMS gyroscope Zou, Junjun Wei, Qi Ju, Chunge Liao, Hua Gu, Haoyu Xing, Bowen Zhou, Bin Zhang, Rong Microsyst Nanoeng Article High-precision microelectromechanical system (MEMS) gyroscopes are significant in many applications. Bias instability (BI) is an important parameter that indicates the performance of a MEMS gyroscope and is affected by the 1/f noise of the MEMS resonator and readout circuit. Since the bandgap reference (BGR) is an important block in the readout circuit, reducing its 1/f noise is key to improving a gyroscope’s BI. In a traditional BGR, the error amplifier is applied to provide a virtual short-circuit point, but it introduces the main low-frequency noise sources. This paper proposes an ultralow 1/f noise BGR by removing the error amplifier and applying an optimized circuit topology. In addition, a simplified but accurate noise model of the proposed BGR is obtained to optimize the BGR’s output noise performance. To verify this design, the proposed BGR has been implemented in a 180 nm CMOS process with a chip area of 545 × 423 μm. The experimental results show that the BGR’s output integrated noise from 0.1 to 10 Hz is 0.82 μV and the thermal noise is 35 nV/√Hz. Furthermore, bias stability tests of the MEMS gyroscope fabricated in our laboratory with the proposed BGR and some commercial BGRs are carried out. Statistical results show that reducing the BGR’s 1/f noise can nearly linearly improve the gyroscope’s BI. Nature Publishing Group UK 2023-04-17 /pmc/articles/PMC10106465/ /pubmed/37077933 http://dx.doi.org/10.1038/s41378-023-00505-3 Text en © The Author(s) 2023 https://creativecommons.org/licenses/by/4.0/Open Access This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in a credit line to the material. If material is not included in the article’s Creative Commons license and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/ (https://creativecommons.org/licenses/by/4.0/) .
spellingShingle Article
Zou, Junjun
Wei, Qi
Ju, Chunge
Liao, Hua
Gu, Haoyu
Xing, Bowen
Zhou, Bin
Zhang, Rong
A 0.82 μVrms ultralow 1/f noise bandgap reference for a MEMS gyroscope
title A 0.82 μVrms ultralow 1/f noise bandgap reference for a MEMS gyroscope
title_full A 0.82 μVrms ultralow 1/f noise bandgap reference for a MEMS gyroscope
title_fullStr A 0.82 μVrms ultralow 1/f noise bandgap reference for a MEMS gyroscope
title_full_unstemmed A 0.82 μVrms ultralow 1/f noise bandgap reference for a MEMS gyroscope
title_short A 0.82 μVrms ultralow 1/f noise bandgap reference for a MEMS gyroscope
title_sort 0.82 μvrms ultralow 1/f noise bandgap reference for a mems gyroscope
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10106465/
https://www.ncbi.nlm.nih.gov/pubmed/37077933
http://dx.doi.org/10.1038/s41378-023-00505-3
work_keys_str_mv AT zoujunjun a082mvrmsultralow1fnoisebandgapreferenceforamemsgyroscope
AT weiqi a082mvrmsultralow1fnoisebandgapreferenceforamemsgyroscope
AT juchunge a082mvrmsultralow1fnoisebandgapreferenceforamemsgyroscope
AT liaohua a082mvrmsultralow1fnoisebandgapreferenceforamemsgyroscope
AT guhaoyu a082mvrmsultralow1fnoisebandgapreferenceforamemsgyroscope
AT xingbowen a082mvrmsultralow1fnoisebandgapreferenceforamemsgyroscope
AT zhoubin a082mvrmsultralow1fnoisebandgapreferenceforamemsgyroscope
AT zhangrong a082mvrmsultralow1fnoisebandgapreferenceforamemsgyroscope
AT zoujunjun 082mvrmsultralow1fnoisebandgapreferenceforamemsgyroscope
AT weiqi 082mvrmsultralow1fnoisebandgapreferenceforamemsgyroscope
AT juchunge 082mvrmsultralow1fnoisebandgapreferenceforamemsgyroscope
AT liaohua 082mvrmsultralow1fnoisebandgapreferenceforamemsgyroscope
AT guhaoyu 082mvrmsultralow1fnoisebandgapreferenceforamemsgyroscope
AT xingbowen 082mvrmsultralow1fnoisebandgapreferenceforamemsgyroscope
AT zhoubin 082mvrmsultralow1fnoisebandgapreferenceforamemsgyroscope
AT zhangrong 082mvrmsultralow1fnoisebandgapreferenceforamemsgyroscope